KLA-M5840-271 KLA-M5840-281 SERVO BAORD ASSY
| KMK-M2623-00 | COVER,SCALE |
| KLW-M26CB-00 | STATOR A ASSY. |
| KLW-M26CJ-00 | COIL,Y AXIS |
| KLW-M26CN-00 | STATOR B ASSY. |
| KLW-M26T1-A0 | LINEAR SCALE ASSY. |
| KLW-M26T2-00 | HEAD,LINEAR SCALE |
| KLW-M26T5-00 | COVER,LINEAR 3 |
| KLW-M26T9-00 | COVER,LINEAR 4 |
| KLW-M26TA-00 | TAPE,LINEAR SCALE |
| KLW-M26TB-00 | HOLDER,SCALE |
| KLW-M653A-00 | SENSOR,Y ORG ASSY |
| KMK-M2625-00 | COVER,Y AXIS 2-2 |
| KMK-M2625-01 | COVER,Y AXIS 2-2 |
| KMK-M2626-00 | COVER,Y AXIS 1-2 |
| KMK-M2626-01 | COVER,Y AXIS 1-2 |
| KMK-M2627-A0 | SENSOR 1 ASSY. |
| KMK-M2627-B0 | SENSOR 2 ASSY. |
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